Applying Artificial Neural Networks and Fuzzy Clustering Method for Fault Detection of CVD Equipment
碩士 === 中原大學 === 機械工程研究所 === 98 === Currently larger panels are manufactured in the TFT-LCD (Thin Film Transistor-Liquid Crystal Display) fabs and, moreover, the semiconductor manufacturing technology, following Moore's Laws, is developed for reduced feature size, larger wafer size, and higher d...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/10829491442899454915 |