AlInGaP LED Stress Sensor and It’s Application on Package
碩士 === 大葉大學 === 電機工程學系 === 98 === Piezo-resistors act as a stress sensors were made by dry etching through AlGaInP/GaAs LED epi-wafer. Three meander shaped stress sensors along [110] and [ 10] were made on P layers. Their resistances were approximately 40KΩ、140KΩ and 250KΩ respectively. External for...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03026262858869701924 |