An Automatic Evaluation System for Surface Profile in Microlens Array Using Optical Interferometric Microscope
碩士 === 逢甲大學 === 自動控制工程所 === 98 === In this paper, an automatic evaluation method for the surface profile of the microlens array using an optical interferometric microscope is presented. For inspecting the microlens array, an XY-table is used to position the micro-lens array. With a He-Ne laser beam...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18194194611887237348 |