Design and Fabrication of Magnetic Scanning Micromirror
碩士 === 逢甲大學 === 自動控制工程所 === 98 === This study proposed a scanning micromirror actuated by magnetic force which combines the Lorentz force and static-magnetic force. The design structure composed of electroplating coil on structure surface. According to the design of rotation beams in the x-axis and...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/01474854984974399458 |