Reliability of the Gate-All-Around Poly-si TFT with Multiple Nanowire Channels

碩士 === 逢甲大學 === 產業研發碩士班 === 98 === Poly-Si thin film transistors(TFTs) have been widely used as switching elements in active matrix display. For applications on system-on-pannel (SOP) and three-dimension integrated circuits (3-D ICs),further improvement of device performance are required. The mobili...

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Bibliographic Details
Main Authors: Chun-Kai Wang, 王俊凱
Other Authors: Tsung-Kuei Kang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/32722586867220034470