Fatigue Testing of SCS and Surface Coated Cantilever Beams
碩士 === 逢甲大學 === 機械工程學所 === 98 === In this thesis, the single crystal silicon (SCS) and surface coated(Si3N4/SiO2) SCS micro-cantilever beams are fabricated on 4-inch wafers by MEMS fabrication techniques. Experimentally, a MTS micro-force testing machine (Tytron 250) with a high temperature furnace...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/42676813261000786001 |