Fatigue Testing of SCS and Surface Coated Cantilever Beams
碩士 === 逢甲大學 === 機械工程學所 === 98 === In this thesis, the single crystal silicon (SCS) and surface coated(Si3N4/SiO2) SCS micro-cantilever beams are fabricated on 4-inch wafers by MEMS fabrication techniques. Experimentally, a MTS micro-force testing machine (Tytron 250) with a high temperature furnace...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42676813261000786001 |