Fabrication of thin-film silicon solar cells using high density plasma chemical vapor deposition and study of the activation characteristics of its related films
碩士 === 華梵大學 === 電子工程學系碩士班 === 98 === In this thesis, we studied how to fabricate amorphous silicon thin-film solar cells on a glass substrate. The experiment was divided into two major parts. In the first part, we started with the activation of amorphous silicon thin film on glass by microwave annea...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39987891199815671439 |