The Study of Power TFT LDMOSFET on Insulator with Shielding-Trench Structure
碩士 === 華梵大學 === 電子工程學系碩士班 === 99 === The topic of this thesis is to combine the power device structure and low temperature thin film technique, hope to fabricate thin film high power transistors with high block by using low temperature processes. The first part, polysilicon grain size was controlle...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/48318386034478596897 |