Research of the automatic wafer visual examination machine development
碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === Wafer foundry is an critical developmnet of Taiwan electronic industry.The processes of Wafer-making includes layering, patterning,doping and heat treatments.During all manufacturing processes, patterning is the easiest stage to cause defected wafer.In order to...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24395970524255281750 |