Research of the automatic wafer visual examination machine development

• Main Authors: Kei-Yang Chen, 陳貴陽
• Other Authors: Ching-Kuo Lin
• Format: Others
• Language: zh-TW
• Published: 2010
• Online Access: http://ndltd.ncl.edu.tw/handle/24395970524255281750

碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === Wafer foundry is an critical developmnet of Taiwan electronic industry.The processes of Wafer-making includes layering, patterning,doping and heat treatments.During all manufacturing processes, patterning is the easiest stage to cause defected wafer.In order to maintain good quality and high yield rate, make inspection after development is necessary.At present, though the processes defects and pollution testing could be found by AOI(Automated Optical Inspection),AOI still can't completely replace man-made visual inspection. For now, there has two ways to inspect wafer-loading when the operators mske visual inspection.One way is using vacuum pen to access wafer then operators make visual inspection.The other way is using wafer loader equipment.Wafer loader equipment will automatically take wafer out from wafer cassette then put onto another inspection device for easy review.Using vacuum pen is very easy to cause wafer surface defects due to operator's mistakes.And using wafer loader equipment is critical inconvenient because wafer must be sent to another inspection device as reviewing reverse-side. The advantages of the automatic wafer visual examination equipment could help operator to inspect wafer by multiple angles, meanwhile also could access wafer safely with the features of easy using, low equipment cost and high production capability.