The Recipe Study of the Photo-resist Passivation layer for Thin Film Transistor
碩士 === 華梵大學 === 機電工程學系博碩專班 === 98 === In TFT-LCD array process that general use positive photo-resist definition pattern, it main material was Novolac resin, this photo-resist will stripping in pattern define finished after etching process, but regard to organic photo-resist was reserve for dielectr...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12281768577464056934 |