Pre-treatment and Post-oxidation Annealing Effect of Liquid Phase Deposited TiO2 on the AlGaAs
碩士 === 義守大學 === 電子工程學系碩士班 === 98 === The TiO2 film deposited on AlGaAs substrate with sulfur pre-treatment by Liquid Phase Deposition (LPD) has been demonstrated. In the thesis, we also tried to improve the electrical characteristics of LPD-TiO2 film on AlGaAs after rapid thermal annealing (RTA). Th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26343679339273757030 |