Analysis on the Differences between Conveyor and OHT in Production-A study of 450 mm Fab

碩士 === 國立高雄應用科技大學 === 工業工程與管理系 === 98 === The semiconductor industry of the world has gradually maturated due to wafer manufacturing process continuous improvement in technology and economies of scale. According to Moore's Law, the wafer will enlarge from 12 inches to 18 inches. Thus, the weigh...

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Bibliographic Details
Main Authors: Feng-Yuan Hsu, 許峰源
Other Authors: Chia-Nan Wang
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/19328406460890466695