Study on MIS Properties of (100) Oriented AlN Films by Reactive RF Magnetron Sputtering
碩士 === 國立高雄應用科技大學 === 電子工程系 === 98 === In this research, the non c-axis (100) oriented AlN thin films were deposited on p-type (100) silicon substrate by RF magnetron sputtering. The dependence between sputtering conditions ( Target-substrate distance, Sputtering time, RF power ) were investigated b...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88163993756597286910 |