A Study on the Characterization of Silver-containing DLC Film
碩士 === 國立高雄應用科技大學 === 模具工程系 === 98 === The silver-containing DLC films are deposited on glass using magnetron reactive sputtering. The watt of input energy is applied as main process variable to obtain 1~2 μm thick films. The basic properties such as hardness, electric resistivity and surface roughn...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17587053481315660851 |