Study of Physcial Properties in Oxide Thin Films by DC magneture sputtering
碩士 === 明新科技大學 === 電子工程研究所 === 98 === In this study, the cuprous oxide thin film have been deposited by reactive DC sputtering with different oxygen flows, substrate temperature and plasma power on ITO and Cu-deposited glass. And to fabricate bifacial optoelectronic devices, such as solar cell, which...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50992432409615771848 |