Fabrication of nitrogen doped p-type ZnO thin films by the sol-gel method
碩士 === 明新科技大學 === 精密機電工程研究所 === 98 === The objective of this research is to investigate the properties of nitrogen-doped p-type ZnO thin films (NZO) fabricated by sol-gel method. Experiments were conducted on (100) Si wafer. Surface morphology, x-ray diffraction, electrical properties and SEM were...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46876018821482982768 |