Fabricate of AZO transparent conductive film for thin film solar cell application
碩士 === 國立中興大學 === 光電工程研究所 === 98 === In this experiment, we used RF sputtering system to deposited AZO thin films on Corning 1737 glass and PET plastic substrate. We investigated the better properties for the thin films with different RF power (50-150 W) and substrate temperature (RT-200 ℃). In orde...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/43500911225212978603 |