Study on the in situ Vacuum Cavity Structure in GAA-MNCs Poly-Si TFTs
碩士 === 國立中興大學 === 光電工程研究所 === 98 === In this thesis, we utilize sidewall spacer technique to form multiple nanowire channels (MNCs) without any advanced lithography equipment. Furthermore, suspending multiple nanowire channels were formed by wet etching sacrificial SiO2 to establish gate-all-around...
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37594944865001474694 |