Study On Nanostructure Silicon Thin Film Solar Cells
碩士 === 國立中興大學 === 光電工程研究所 === 98 === In this thesis,at first we utilize the method of forming neat PS nanoball lithograth to apply on a-Si glass substrate,and then fabricate a-Si nanorod by using ICP-RIE.Second,we apply hydrogen surface plasma on a-Si nanorod.And last,we utilize PECVD system deposit...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89393116443933959975 |