Low-vacuum preparation of Al and AlN thin films by magnetron sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 ===
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80713755696017924667 |