Low-vacuum preparation of Al and AlN thin films by magnetron sputtering
碩士 === 國立中興大學 === 材料科學與工程學系所 === 98 ===
Main Authors: | Li-Ren Yao, 姚力仁 |
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Other Authors: | Fu-Hsing Lu |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/80713755696017924667 |
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