Studies of Defects in GaN Films and Distribution of Ge in SiO2/Ge/Si Structures by Using Scanning Near-Field Optical Microscope
碩士 === 國立中興大學 === 物理學系所 === 98 === We present nondestructive testing methods for detecting the defect distribution in GaN thin film on patterned sapphire substrates and the uniformity of Ge on patterned Si wafers by using scanning near-field optical microscopy (SNOM). There are two different pattern...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31306900340412551201 |