Structural analyses of the dislocations in ZnO films grown on (11-20) or (0001) sapphire substrates
碩士 === 國立中興大學 === 物理學系所 === 98 === Characteristics of dislocations in wurtzite ZnO films deposited on (11-20) or (0001) sapphire substrates were investigated in this study. ZnO films were prepared by atomic layer deposition (ALD) using diethylzinc (DEZn) and nitrous oxide (N2O), and some of them hav...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28907050610834498344 |