Study on the Fabrication of Hydrogenated Amorphous Silicon Films using VHF-PECVD for Thin-Film Solar Cell
碩士 === 國立中興大學 === 電機工程學系所 === 98 === In this thesis, intrinsic hydrogenated amorphous silicon thin films (i-a-Si:H), P-type and N-type hydrogenated amorphous silicon thin films (p-a-Si:H and n-a-Si:H) are deposited by very-high-frequency plasma-enhanced chemical vapor deposition (VHF-PECVD). VHF-PEC...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59039880654901433333 |