Investigation of Transferring the Thin Film GaN LED Epi-structure to Metal Substrates by Chemical Lift-off Technology
碩士 === 國立中興大學 === 精密工程學系所 === 98 === This thesis presents the novel technique to perform chemical lift-off (CLO) GaN epilayer from sapphire substrate to copper substrate by 3-μm-width SiO2 narrow strips as sacrificial layer. The full LED structure was fabricated on both regular sapphire and the sap...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80009562693027821048 |