Study on fabrication processing and related characteristions of miniature ribbon microphone
碩士 === 國立中興大學 === 精密工程學系所 === 98 === This thesis presents the characteristic of miniature ribbon microphone. They were fabricated by micro-electro-mechanical system techniques. To enhance the overall yield by reducing thermal stress and process temperature, the Ni/Co substrate separating technique w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69647692038708467942 |