Energy-saving Analysis of the Make-up Air Handling Units for a semi-conductor facility
碩士 === 國立勤益科技大學 === 冷凍空調系 === 98 === In the 12 inches wafer semiconductor facilities system, 28% of the power consumption accounts for cleanroom HVAC systems. About 42% of cleanroom overall energy consumption are depleted in make-up air unit (MAU) system. Therefore, it is essential and vital to cond...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02691421718647400012 |