Energy-saving Analysis of the Make-up Air Handling Units for a semi-conductor facility
碩士 === 國立勤益科技大學 === 冷凍空調系 === 98 === In the 12 inches wafer semiconductor facilities system, 28% of the power consumption accounts for cleanroom HVAC systems. About 42% of cleanroom overall energy consumption are depleted in make-up air unit (MAU) system. Therefore, it is essential and vital to cond...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/02691421718647400012 |
| Summary: | 碩士 === 國立勤益科技大學 === 冷凍空調系 === 98 === In the 12 inches wafer semiconductor facilities system, 28% of the power consumption accounts for cleanroom HVAC systems. About 42% of cleanroom overall energy consumption are depleted in make-up air unit (MAU) system. Therefore, it is essential and vital to conduct the energy-saving strategy specific for MAU system. In this study, the round-around coils with reheating and reheating coils were proposed to examine the energy saving potential for MAU system of a semiconductor cleanroom facility in Taiwan. The results from field measurement revealed that the MAU systems incorporated with round-around coils and recirculation pumps could reduce the energy consumption substantially. The annual savings for electricity reached NTD 3.2 millions during typical summer weather conditions. Furthermore, while conducting the strategy of dual chilled water temperatures (50C/90C) for MAU system, there exists a substantial energy saving through the long term field measurement data. Operating costs for MAU systems could be reduced effectively and the total annual saving was about 8.22 millions for chiller system by conducting dual chilled water temperatures strategy. It is also expected the investigation could provide the best practice of energy-saving and cost-sown strategies specific for the MAU systems of semiconductor cleanroom.
|
|---|