Energy Consumption and Energy Saving for a Facility System 12-inch Semiconductor Factory
碩士 === 國立勤益科技大學 === 冷凍空調系 === 98 === With the development of the semiconductor fabrication technology, the fabrication process of the semiconductor factory also was transferred from 8 in wafer fabrication technology to 12 in wafer fabrication technology. The area of the factory also gradually enlarg...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78490816406501246371 |