A PIEZORESISTIVE BRIDGE-MICROCANTILEVER BIOSENSOR BY CMOS PROCESS FOR SURFACE STRESS MEASUREMENT
博士 === 國立成功大學 === 航空太空工程學系碩博士班 === 98 === Many new biosensors design based on microcantilever have been proposed by using the fast and sensitive response of micromechanical detection. Microsensors based on piezoresistive microcantilevers have been proposed to measure the surface stress change by mo...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23513461069808016566 |