Optical Modulation and Photodetection in Silicon Photonics
博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === In the first part of the dissertation, a collection of SiON films with different chemical compositions (various O/N ratios) were deposited on p-type silicon substrates using plasma-enhanced chemical vapor deposition (PECVD) method. These films were then opti...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27209649946126664385 |