Study of textured Al-doped ZnO thin films by wet-etching methods and application on front electrode of solar cell
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === This study addresses the optimization of Rf magnetron-sputtered aluminum doped zinc oxide (ZnO:Al) thin films as the front contacts in silicon thin film solar cells. So this front contact has to exhibit low series resistance and high transparency in the visi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10399504904672644922 |