Microwave Plasma CVD Nanodiamond and Its Application to RF MEMS Capacitive Switches
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === In this research, we deposit nanodiamond films by Microwave Plasma Chemical Vapor Deposition. Nanodiamond used as dielectric layer of RF MEMS capacitive switches. The major problem need to be solved is charging effect, and it also limit the life time of swit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02237981579789795565 |