Suppressing the Dark Current in Ge MSM Photodetectors Achievable with Thermal Oxidation/Passivation Techniques
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 98 === In this thesis, metal-semiconductor-metal (MSM) infrared photodetectors (PDs) with light absorption taken place in the Ge substrate were fabricated and tested. Due to its low bandgap, many defects are typically present in the surface, which is one of primary...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29821190825866926640 |