Study of Nano-probing Reliability and Its Applications for deep Sub-micro CMOS Technology Failure Analysis
碩士 === 國立成功大學 === 電機工程學系碩博士班 === 98 === Nano-probing is one of the most technologies widely applied in semiconductor field. However, its reliability has not been evidenced yet. In this work, for the first one, we designed some experiments to study its reliability. Experiment results show that with t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56902383519720887320 |