A study on the microstructure and mechanical properties of hard Ti-Si-N nanocomposite coatings by reactive co-sputtering
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 98 === In this study, the nanocomposites of Ti-N, Ti-Si-N single layer coatings and multilayer coatings including Ti-N/Si-N, Ti-N/Ti-Si-N/Si-N and Ti-Si-N/Ti-N with different ways were prepared by reactive magnetron co-sputtering system. We’ll discuss the effects of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39322066768342692143 |