The Study of Porous Silicon Used in Pptical Biosensing
碩士 === 國立暨南國際大學 === 生物醫學科技研究所 === 98 === The porous silicon are structures which base by semiconducting material—crystalline silicon, by electrochemical etching and given voltage and hydrofluoric acid (HF) on the substrate to cause electrochemical reaction. Moreover, etch periodically arranged micro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90127936628507008865 |