Design of capacitive micro tilt sensor in standard CMOS-MEMS process
碩士 === 國立暨南國際大學 === 電機工程學系 === 98 === Tilt sensor is a common measurement tool used in construction, aerospace, machinery, semiconductor, chemical and biomedical engineering and a variety of applications. However, the general tilt sensors used in engineering are not suitable for use in portable prod...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/96092945479976092308 |