Constructing and Application of Running Efficiency Indices of Processing Tools in an IC Fab
博士 === 國立交通大學 === 工業工程與管理學系 === 98 === Overall equipment efficiency (OEE) is a composite metric, which includes quality efficiency (QE), available efficiency (AE), operational efficiency (OE) and rate efficiency (RE). OEE is widely adopted in semiconductor manufacturing to assess and enhance the pro...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60995344028955226375 |