Poly-Crystalline Silicon Nanowire Field Effect Transistor for
博士 === 國立交通大學 === 生物科技學系 === 98 === A simple and low-cost method to fabricate poly-silicon nanowire field effect transistor (poly-Si NW FET) for biosensing application was demonstrated. The poly-silicon nanowire (ploy-Si NW) channel was fabricated by employing the poly-silicon (poly-Si) sidewall spa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22354556467215645059 |