Numerical Simulation of Clean Bench for 300mm Wafers
碩士 === 國立交通大學 === 工學院碩士在職專班精密與自動化工程組 === 98 === The IC industry of Taiwan reached one trillion dollars in 2006. The annual demand for equipments and spare parts are more than 250 billion, but it was mostly contributed by the foreign suppliers. The reason is the domestic suppliers didn’t focus on res...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73734262496366936232 |