DC and RF Performance Improvement of 60 nm InAs Quantum Well Field Effect Transistors by Self-alinged Gate Technology

碩士 === 國立交通大學 === 材料科學與工程系所 === 98 === In general, III-V compound semiconductors have significantly higher intrinsic mobility than silicon and substrates are semi-insulating. These material properties combine with band gap engineering, epitaxial layer growth technique and process technologies result...

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Bibliographic Details
Main Authors: Chen, Yu-Lin, 陳鈺霖
Other Authors: Chang, Ti
Format: Others
Language:en_US
Published: 2009
Online Access:http://ndltd.ncl.edu.tw/handle/13616380524178213288