Performance enhancement of high brightness light emission diodes -Laser lift-off damage mechisiam and patterned sapphire substrate
博士 === 國立交通大學 === 材料科學與工程學系 === 98 === The primary objective of this dissertation is provided some detail research of laser lift-off damage mechamism and two-step wet etching patterned sapphire substrate. The effects of the frequency-tripled Nd:YAG laser (355 nm) and the KrF pulsed excimer laser (24...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/06928745499296847341 |