Material Synthesis and Process Development of NiFe-AAO Nanocomposite for Performance Enhancement of On-chip Spiral Inductor
碩士 === 國立交通大學 === 電子工程系所 === 98 === This thesis presented a fully CMOS compatible process to implement NiFe (68 at%. Ni and 32 at.% Fe) –AAO nanocomposite as magnetic core material for on-chip spiral inductor fabrication. The NiFe nanorod arrays with 60~70 nm diameter using DC electroplated are depo...
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| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67510651712976525650 |