Effect of Extreme Ultra-Violet Radiation on Advanced Non-volatile Memories
碩士 === 國立交通大學 === 電子研究所 === 98 === In this thesis, the effects of extreme ultra-violate (EUV) irradiation on the characteristics of the thin film transistor (TFT) Silicon-Oxide-Nitride-Oxide-Silicon (SONOS) non-volatile memory (NVM) and multi-gate TiN nano-crystal (NC) NVM are investigated....
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| Format: | Others |
| Language: | en_US |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82952039130014282223 |