The Effects of Hydrogen Treatment on GaN Surface
碩士 === 國立交通大學 === 電子物理系所 === 98 === The effects of hydrogen treatment on GaN surface and the etching mechanism are studied in this work. Hydrogen is a kind of gases with the ability to etch GaN, so different GaN surfaces appear under different etching conditions in hydrogen. These surfaces can be us...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/04992593306376300617 |