Study of In-Situ Steam Generation (ISSG) for Tungsten Nanocrystal Non-Volatile Memory

碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 98 === In recent years, nonvolatile memory with nanocrystals cell have been widely studied to overcome difficulties occurring to of operation and reliability of conventional floating gate memory. Desirable electrical characteristics of memory devices incl...

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Bibliographic Details
Main Authors: Nien, Wen-Ping, 粘文評
Other Authors: Pan, Fu-Ming
Format: Others
Language:en_US
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/70666582538841422382