A Study of Low-Temperature Polycrystalline Silicon Thin Film Transistors and MOSFETs Using Advanced Materials
碩士 === 國立交通大學 === 電機學院微電子奈米科技產業專班 === 98 === In this thesis, advanced High-κ materials were employed to fabricate high performance low-temperature polycrystalline silicon thin film transistors (TFTs). High performance n-channel poly-Si thin film transistors (TFTs) are demonstrated using the differen...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79710008997147807033 |