Control of Crystalline Fraction of Hydrogenated Microcrystalline Silicon Films in Catalytic Chemical Vapor deposition
碩士 === 國立交通大學 === 顯示科技研究所 === 98 === The crystalline fraction is an important issue for the hydrogenated microcrystalline silicon (μc-Si:H) thin film solar cell. To keep crystalline fraction by catalytic chemical vapor deposition (Cat-CVD), we investigated the controlling of H2 dilution ratio in thi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2009
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41106159717486230080 |